All: The Semiconductor Equipment Manufacturers Institute (SEMI) has published an update on fluorinated gases (F-Gases) as follows:

Please note that a revised version of the SEMI FAQ on the EU F-Gas Regulation is available on the SEMI website: 

http://www.semi.org/eu/semi-faq-eu-f-gas-regulation

The SEMI FAQ provides guidance on compliance for semiconductor manufacturing equipment that may contain F-Gases in components. 

You do not need to be a SEMI member to download this

Neal

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