I don't have one that is specific to MOCVD, but here is one that was
related to another vapor deposition technique. I hope it helps you
out.
Santa Rosa Agilent worker burned severely in flash explosion
http://www.pressdemocrat.com/article/20110426/ARTICLES/110429571
Accident happened when someone from the lab was cleaning "a molecular
beam epitaxy device, a large piece of equipment used for producing
coatings on integrated circuits, officials said"
Sincerely,
Mary Beth Mulcahy
On Wed, Jan 25, 2012 at 8:20 AM, Russell Vernon
I am looking for examples of incidents involving the metal organic chemical
If you have any you can point to I will be grateful
Some people need to look at others failures before they act as though they
Sincerely,
-Russ
Russell Vernon, Ph.D.
Director
Environmental Health & Safety
University of California, Riverside
900 University Ave
Riverside, CA 92521
www.ehs.ucr.edu
russell.vernon**At_Symbol_Here**ucr.edu
Direct (951) 827-5119
Admin (951) 827-5528
Fax (951) 827-5122
http://www.ucop.edu/riskmgt/uctrips/
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Dear Div CHAS members,
vapor deposition equipment
believe there is an elevated hazard Ð stories help.